JPH0735398Y2 - ウエハ用バスケット - Google Patents
ウエハ用バスケットInfo
- Publication number
- JPH0735398Y2 JPH0735398Y2 JP1990025889U JP2588990U JPH0735398Y2 JP H0735398 Y2 JPH0735398 Y2 JP H0735398Y2 JP 1990025889 U JP1990025889 U JP 1990025889U JP 2588990 U JP2588990 U JP 2588990U JP H0735398 Y2 JPH0735398 Y2 JP H0735398Y2
- Authority
- JP
- Japan
- Prior art keywords
- basket
- identification mark
- mark
- film
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 34
- 239000000126 substance Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 19
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000012780 transparent material Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- -1 polypropylene Polymers 0.000 description 6
- 230000004927 fusion Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990025889U JPH0735398Y2 (ja) | 1990-03-14 | 1990-03-14 | ウエハ用バスケット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990025889U JPH0735398Y2 (ja) | 1990-03-14 | 1990-03-14 | ウエハ用バスケット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03116041U JPH03116041U (en]) | 1991-12-02 |
| JPH0735398Y2 true JPH0735398Y2 (ja) | 1995-08-09 |
Family
ID=31528807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990025889U Expired - Lifetime JPH0735398Y2 (ja) | 1990-03-14 | 1990-03-14 | ウエハ用バスケット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735398Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11255242A (ja) * | 1998-03-11 | 1999-09-21 | Nippon Grease Nipple Kk | 板状物品の収納凹部への密閉溶着方法及びそれを利用して溶着した樹脂製品 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62123735A (ja) * | 1985-11-22 | 1987-06-05 | Mitsubishi Electric Corp | ウエ−ハカセツト |
| JPH01316957A (ja) * | 1988-06-15 | 1989-12-21 | Nec Corp | 枚葉式処理装置 |
| JPH0284319U (en]) * | 1988-12-20 | 1990-06-29 |
-
1990
- 1990-03-14 JP JP1990025889U patent/JPH0735398Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03116041U (en]) | 1991-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |